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Home page > LPCNO > Publications > Articles > 2008 > Silicon nanoparticles synthesized in SiO2 pockets by stencil-masked low-energy ion implantation and thermal annealing

J. Grisolia, C. Dumas, G. BenAssayag, C. Bonafos, S. Schamm, A. Arbouet, V. Paillard, M.A.F. Van den Boogaart, J. Brugger, P. Normand.

Silicon nanoparticles synthesized in SiO2 pockets by stencil-masked low-energy ion implantation and thermal annealing

Superlattices and Microstructures, doi:10.1016/j.spmi.2007.12.013